Anatech SP150 Quartz Barrel Plasma Asher/Etcher Control Unit – 300W, 13.56 MHz RF, 120V

Description

Anatech Ltd. SP150 Plasma Asher / Etcher Control Console Manufacturer: Anatech Ltd. Model: SP150 CONTROL Serial Number: 203009 Voltage: 120V Electrical Specifications: Voltage: 120V, 60 Hz Amperage: 10A Gas/Water Pressure: 5–20 PSI RF Power System: RF Frequency: 13.56 MHz (ISM standard) RF Power Output: 0–300W RF Adjustment: Front panel RF SET potentiometer Forward/Reflected Power: Dual LED digital display with FORWARD/REFLECTED toggle switch Matching Network: Manual Vacuum/Process Controls: Pressure Display: Digital LED readout (in Torr) with SP1/SP2 setpoints, up/down navigation Flow Display: Digital LED readout — gas flow rate Valve Control: OPEN / CLOSE toggle switch (gas inlet valve) Process Mode: STANDBY / RUN toggle switch Timer: Potter & Brumfield mechanical countdown timer with digital display Process Buttons: SET / START (green) / STOP (red) Purge Function: PURGE toggle switch Power: POWER ON (green) / POWER OFF (red) push buttons Rear Panel Connections: RF OUT: N-type coaxial connector → to plasma chamber GAS IN: Dual gas inputs (brass fittings) GAS OUT: Gas outlet fitting INTERFACE CABLE: DB-25 connector — for external control/automation AC Power: Standard IEC inlet, 120V Chamber Specifications (SP150 System): Quartz Chamber: 10" diameter x 18" long Planar Electrode: 9" x 16" Gas Inputs: Two independent gas inputs Ideal For: Photoresist ashing, surface cleaning, and descuming of semiconductor wafers, PCBs, and substrates Semiconductor fabrication, MEMS, university research labs, and microelectronics manufacturing Surface activation and modification for bonding, adhesion, and coating applications Removed from working use Sold as-is, with no warranties or guarantees. Assistance available for loading at pickup. Feel free to use Q&A feature to send any offers Please reach out to DJ for any questions: DJ@factorx.com | (808)649-0700