Anatech 600-Series SP150 Plasma Asher/Etcher Chamber Module

Description

Anatech Ltd. 600-Series SP150 Plasma Asher / Etcher Chamber Module Manufacturer: Anatech Ltd. Model: SP150 CHAMBER (600-Series) Serial Number: 4203009 Voltage: 120V Electrical Specifications: Voltage: 120V, 60 Hz Amperage: 10A Gas/Water Pressure: 5–20 PSI (gas) Chamber Specifications: Chamber Type: Aluminum box — front-loading with large circular access port Door Seal: Orange silicone O-ring for vacuum integrity Viewport: Large circular glass viewport for process monitoring Electrode Configuration: Planar — dual parallel aluminum electrodes (upper and lower) Matching Network: Planar Matching Network — integrated on front door panel Inductor selector: Position 1 / Position 2 DOWN / UP capacitor tuning buttons LIMIT indicator (red LED) Rear Panel Connections: RF IN: N-type coaxial connector — from SP150 CONTROL RF OUT MAIN VAC VALVE: Solenoid valve connector INTERFACE CABLE: DB-25 connector — for control unit integration N2 BACKFILL / GAS IN: Stainless needle valve with gas inlet fitting Vacuum Exhaust Port: Bottom-rear pump port Cooling Fan: Large rear-mounted axial fan Compatible Control Unit: Designed to interface directly with the Anatech SP150 CONTROL (also available — see companion listing). Serial numbers indicate a matching set. Ideal For: Photoresist ashing and descuming Surface activation and cleaning of semiconductor wafers, PCBs, and substrates MEMS, microelectronics research, university fabrication labs, and semiconductor production Removed from working use Sold as-is, with no warranties or guarantees. Assistance available for loading at pickup. Feel free to use Q&A feature to send any offers Please reach out to DJ for any questions: DJ@factorx.com | (808)649-0700