Brooks Digital Gas MFC for CO2 at 10 SLPM MFC Model: SLAMF5071GAB1A2A1

Full Description

SLAMF50 Mass Flow Controller CO2 10 SLPM REF P/N Base Model SLAMF50 REV B Mass Flow Controller Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 70F Meter Material 316L SS Valve Type NC Valve Seat Viton O-Ring Viton Elect Conn 2x Female D-coded M12, 1x 5pin M8 Power Proc Conn Sz 1/4-in Conn Type FNPT Fs Flow Rate 10 SLPM Gas CO2 Inl Pressure 35 psig Out Pressure 2 psig Cal Ref Temp 70F Input Signal Digital Output Sig Digital Comm EtherNet/IP Baudrate N/A OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Standard Calibration Oem Cust Standard Brooks label Orifice Size 0.048 Restrictor Type ACLFE/Wiremesh Restrictor Size Size code 2 N2 E. Gas Factor 0.74 N2_EQ 12.544016 NLPM CRN Province N/A RT Aux Input N/A Viscosity 0.0147 Density 0.0062 GM/CC Specific Heat 0.8894 J/g K