Brooks Digital Gas MFC for Nitrogen at 10 SLPM MFC Model: SLAMF5071GAB1A2A1

Full Description

SLAMF50 Mass Flow Controller N2 10 SLPM REF P/N Base Model SLAMF50 REV B Mass Flow Controller Max Press 1500 psig [103 BAR] Max Temperature 149F [65C] Temperature 70F Meter Material 316L SS Valve Type NC Valve Seat Viton O-Ring Viton Elect Conn 2x Female D-coded M12, 1x 5pin M8 Power Proc Conn Sz 1/4-in Conn Type FNPT Fs Flow Rate 10 SLPM Gas N2 Inl Pressure 35 psig Out Pressure 2 psig Cal Ref Temp 70F Input Signal Digital Output Sig Digital Comm EtherNet/IP Baudrate N/A OutputEnh Std Response PwrSplyIn 24 Vdc Cert Safe Area Mtg Att [1] Horizontal base down Calibration [B] Standard Calibration Oem Cust Standard Brooks label Orifice Size 0.032 Restrictor Type ACLFE/Wiremesh Restrictor Size Size code 1 N2 E. Gas Factor 1 N2_EQ 9.282572 NLPM CRN Province N/A RT Aux Input N/A Viscosity 0.0177 Density 0.0039 GM/CC Specific Heat 1.0401 J/g K