Auction ended · final winning bid
$5,150after 4 bids
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STS Multiplex ICP RIE Cluster Tool, 150mm
This lot sold for $5,150 at government auction in North Wilkesboro, NC on August 6, 2026, after 4 bids.
Current bid:
$5,150
4 bids
Time Left
Ends Aug 6, 2026
Market demand: Tools in North Carolina sell about 84% of the time, typically ~12 bids. Based on 439 completed sales over the last year.
Seller
Lumentum Operations
Condition: As-is
Full Description
STS Multiplex ICP RIE Cluster Tool, 150mm, 3-chamber. Serial no. C081. Includes: 1ea control cabinet w/ PDUs/control computers; 2ea control cabinets w/ PDUs, Leybold Mag Drive 1000 controller, MKS 600-series pressure controller; 5ea ENI ACG-10B RF generators; 2ea ENI VL-400 phase shift controller; 3ea ENI Genesis-series RF generators; 5ea Leybold MAG 1500 turbopumps; 2ea Leybold MAG 900 turbopumps; 1ea Brooks transfer robot; 2ea Thermo Neslab Merlin M75 recirculating chillers; 1ea Neslab CFT-75 recirculating chiller; 3ea Ebara ESR20N vacuum pump; 1ea Ebara A25S vacuum pump. Note- - 3 chambers #'s 2-3 & 4, icludes a control cabinet for each chamber and (1) additional for the dealer/transfer module. Tool ran CL2 & BCL3 process. There are CL2, BCL3, N2, O2 and Argon MFC's, chamber #2 used a Leybold MAG 1500 pump and chambers 3 & 4 used MAG 900. Unit has been moved to a warehouse. There are 24 total pieces. 40x48x21 500Lbs 24x36x60 800Lbs 35x15x28 300Lbs 24x36x72 600Lbs 40x48x32 500Lbs 40x48x47 1000Lbs 48x48x57 2000Lbs 14x36x53 500Lbs 20x36x58 500Lbs 28x45x84 1000Lbs 22x34x58 1000Lbs 24x45x72 750Lbs 30x26x53 800Lbs 24x45x26 500Lbs 48x48x32 500Lbs 15x35x28 300Lbs 24x32x72 600Lbs 15x35x28 300Lbs 24x32x72 600Lbs 24x32x72 600Lbs 26x16x26 400Lbs 17x25x36 200Lbs 17x25x36 200Lbs 12x104x78 500Lbs
Pickup information
Lumentum Operations
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