Auction ended · final winning bid
$9,100after 4 bids
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STS Multiplex ICP RIE Cluster Tool, 150mm
This lot sold for $9,100 at government auction in North Wilkesboro, NC on August 6, 2026, after 4 bids.
Current bid:
$9,100
4 bids
Time Left
Ends Aug 6, 2026
Market demand: Tools in North Carolina sell about 84% of the time, typically ~12 bids. Based on 439 completed sales over the last year.
Seller
Lumentum Operations
Condition: As-is
Full Description
STS Multiplex ICP RIE Cluster Tool, 150mm, 3-chamber. Serial no. C120. Includes: 1ea control cabinet w/ PDUs/control computers; 2ea control cabinets w/ PDUs, Leybold Mag Drive 1000 controller, VAT PM-7 adaptive pressure controller; 6ea ENI Genesis-series RF generators; 4ea ENI ACG-10B RF generators; 2ea Ebara A25S vacuum pumps; 2ea Thermo Neslab Merlin M75 recirculating chillers. There are 3x chambers, 2, 3,& 4. There are 4 control racks per tool. There is a control cabinet for each chamber and an additional one for the dealer/transfer module. The tools ran a CL2 and BCL3 process. There are CL2, BCL3, N2, O2 and Argon MFC's. Chambers used Leybold MAG 1500 pumps. Missing turbopumps. As is. Unit has been moved to a warehouse. There are 20 pieces total. 18x46x24 300Lbs 22x47x69 500Lbs 30x50x82 1500Lbs 15x36x28 300Lbs 24x48x28 600Lbs 48x48x16 200Lbs 43x46x57 1500Lbs 16x35x30 300Lbs 16x26x27 300Lbs 16x35x30 300Lbs 30x25x49 500Lbs 29x49x80 750Lbs 24x32x72 500Lbs 24x32x72 500Lbs 24x32x72 500Lbs 24x32x72 500Lbs 40x48x36 800Lbs 40x52x32 600Lbs 29x49x80 750Lbs 12x98x79 1000Lbs
Pickup information
Lumentum Operations
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